Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2
In this article nickel interdigital capacitors were fabricated on top of silicon substrates.The capacitance of the interdigital capacitor was optimized by coating the angilina white electrodes with a 60 nm layer of HfO2.An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measureme